Magnetic random access memory and manufacturing method thereof

ABSTRACT

In a method of manufacturing a semiconductor device, a magnetic random access memory (MRAM) cell structure is formed. The MRAM cell structure includes a bottom electrode, a magnetic tunnel junction (MTJ) stack and a top electrode. A first insulating cover layer is formed over the MRAM cell structure. A second insulating cover layer is formed over the first insulating cover layer. An interlayer dielectric (ILD) layer is formed. A contact opening in the ILD layer is formed, thereby exposing the second insulating cover layer. A part of the second insulating cover layer and a part of the first insulating cover layer are removed, thereby exposing the top electrode. A conductive layer is formed in the opening contacting the top electrode.

RELATED APPLICATIONS

This application is a divisional of U.S. patent application Ser. No.15/966,639 filed Apr. 30, 2018, now U.S. Pat. No. 11,189,658, whichclaims priority to U.S. Provisional Application No. 62/590,136 filed onNov. 22, 2017, the entire contents of each of which are incorporatedherein by reference.

TECHNICAL FIELD

The present disclosure relates to a magnetic random access memory (MRAM)device and, more particularly, to an MRAM device based on a magnetictunnel junction cell formed with a semiconductor device.

BACKGROUND

An MRAM offers comparable performance to volatile static random accessmemory (SRAM) and comparable density with lower power consumption tovolatile dynamic random access memory (DRAM). Compared to non-volatilememory (NVM) flash memory, an MRAM offers much faster access times andsuffers minimal degradation over time, whereas a flash memory can onlybe rewritten a limited number of times. An MRAM cell is formed by amagnetic tunneling junction (MTJ) comprising two ferromagnetic layerswhich are separated by a thin insulating barrier, and operates bytunneling of electrons between the two ferromagnetic layers through theinsulating barrier.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A is a schematic view of an MTJ MRAM cell according to anembodiment of the present disclosure.

FIG. 1B is a schematic cross sectional view of the MTJ film stackaccording to an embodiment of the present disclosure.

FIGS. 2A, 2B and 2C show schematic cross sectional views of magneticlayers of the MTJ film stack according to an embodiment of the presentdisclosure.

FIGS. 3A and 3B show operations of the MTJ film stack.

FIGS. 3C and 3D show operations of the MTJ film stack.

FIG. 4A shows a schematic circuit diagram of an MTJ MRAM, FIG. 4B showsa schematic perspective view of a memory cell of the MTJ MRAM and FIG.4C shows a memory cell layout of the MTJ MRAM.

FIG. 5 shows a cross sectional view of a semiconductor device includingan MRAM according to an embodiment of the present disclosure.

FIGS. 6A, 6B and 6C show various stages of a sequential manufacturingprocess of the semiconductor device including an MRAM according to anembodiment of the present disclosure.

FIGS. 7A and 7B show various stages of a sequential manufacturingprocess of the semiconductor device including an MRAM according to anembodiment of the present disclosure.

FIGS. 8A and 8B show various stages of a sequential manufacturingprocess of the semiconductor device including an MRAM according to anembodiment of the present disclosure.

FIGS. 9A and 9B show various stages of a sequential manufacturingprocess of the semiconductor device including an MRAM according to anembodiment of the present disclosure.

FIGS. 10A and 10B show various stages of a sequential manufacturingprocess of the semiconductor device including an MRAM according to anembodiment of the present disclosure.

FIGS. 11A and 11B show various stages of a sequential manufacturingprocess of the semiconductor device including an MRAM according to anembodiment of the present disclosure. FIGS. 11C and 11D show variousstages of a sequential manufacturing process of the semiconductor deviceincluding an MRAM according to another embodiment of the presentdisclosure. FIGS. 11E and 11F show various stages of a sequentialmanufacturing process of the semiconductor device including an MRAMaccording to another embodiment of the present disclosure.

FIGS. 12A and 12B show various stages of a sequential manufacturingprocess of the semiconductor device including an MRAM according toanother embodiment of the present disclosure.

FIGS. 13A and 13B show various stages of a sequential manufacturingprocess of the semiconductor device including an MRAM according toanother embodiment of the present disclosure.

FIGS. 14A and 14B show various stages of a sequential manufacturingprocess of the semiconductor device including an MRAM according toanother embodiment of the present disclosure.

DETAILED DESCRIPTION

It is to be understood that the following disclosure provides manydifferent embodiments, or examples, for implementing different featuresof the invention. Specific embodiments or examples of components andarrangements are described below to simplify the present disclosure.These are, of course, merely examples and are not intended to belimiting. For example, dimensions of elements are not limited to thedisclosed range or values, but may depend upon process conditions and/ordesired properties of the device. Moreover, the formation of a firstfeature over or on a second feature in the description that follows mayinclude embodiments in which the first and second features are formed indirect contact, and may also include embodiments in which additionalfeatures may be formed interposing the first and second features, suchthat the first and second features may not be in direct contact. Variousfeatures may be arbitrarily drawn in different scales for simplicity andclarity. In the accompanying drawings, some layers/features may beomitted for simplification.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The device may be otherwise oriented (rotated 90 degrees orat other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly. In addition, the term“made of” may mean either “comprising” or “consisting of” Further, inthe following fabrication process, there may be one or more additionaloperations in/between the described operations, and the order ofoperations may be changed. In the present disclosure, a phrase “one ofA, B and C” means “A, B and/or C” (A, B, C, A and B, A and C, B and C,or A, B and C), and does not mean one element from A, one element from Band one element from C, unless otherwise described.

FIG. 1A is a schematic view of a MTJ MRAM cell according to anembodiment of the present disclosure, and FIG. 1B is a schematic crosssectional view of the MTJ film stack. The MTJ film stack 100 is disposedbetween a lower metal layer Mx and an upper metal layer My of asemiconductor device. The metal layers Mx and My are used to connect oneelement to another element in a semiconductor device formed at adifferent level above a substrate. Further, the lower metal layer Mx iscoupled to a switching device SW, which can be formed by a MOS FETincluding, but not limited to, a planar MOS FET, a fin FET, agate-all-around (GAA) FET, or any other switching devices. A controlterminal (e.g., a gate terminal of FET) of the switching device iscoupled to a word line. The upper metal layer My is coupled to a bitline. In some embodiments, the switching device SW is disposed betweenthe upper metal layer My and the bit line.

The MTJ film stack 100 shown in FIG. 1B includes a first electrode layer110 coupled to the lower metal layer Mx and a second electrode layer 155coupled to the upper metal layer My. An MTJ functional layer 101 isdisposed between the first electrode layer 110 and the second electrodelayer 155.

The MTJ functional layer 101 includes a second pinned magnetic layer130, a free magnetic layer 140, and a tunneling barrier layer 135 madeof a non-magnetic material and disposed between the second pinnedmagnetic layer 130 and the free magnetic layer 140. The free magneticlayer 140 and the second pinned magnetic layer 130 include one or moreferromagnetic materials that can be magnetically oriented, respectively.The second pinned magnetic layer 130 is configured such that themagnetic orientation is fixed and will not respond to a typical magneticfield. In some embodiments, the thickness of the free magnetic layer 140is in a range from about 0.8 nm to about 1.5 nm. In some embodiments,the thickness of the second pinned layer 130 is in a range from about0.8 nm to about 2.0 nm.

The tunneling barrier layer 135 includes a relatively thin oxide layercapable of electrically isolating the free magnetic layer 140 from thesecond pinned magnetic layer 130 at low potentials and capable ofconducting current through electron tunneling at higher potentials. Insome embodiments, the tunneling barrier layer 135 includes magnesiumoxide (MgO) having a thickness in a range from about 0.5 nm to about 1.2nm.

The MTJ functional layer 101 further includes an antiferromagnetic layer125, as shown in FIG. 1B. The anti-ferromagnetic layer 125 is used tofix the magnetic orientation of the second pinned magnetic layer 130.The antiferromagnetic layer 125 includes ruthenium (Ru) or any othersuitable antiferromagnetic material. In some embodiments, the thicknessof the antiferromagnetic layer 125 is in a range from about 0.4 nm toabout 1.0 nm.

The MTJ functional layer 101 further includes a first pinned magneticlayer 120 and a second pinned magnetic layer 130 both including one ormore magnetic materials, as shown in FIG. 1B.

The first electrode layer 110 is formed on the lower metal layer Mx madeof, for example, Cu, Al, W, Co, Ni, and/or an alloy thereof, and theupper metal layer My made of, for example, Cu, Al, W, Co, Ni, and/or analloy thereof, is formed on the second electrode layer 155.

The second pinned magnetic layer 130 includes multiple layers ofmagnetic materials. In some embodiments, as shown in FIG. 2A, the secondpinned magnetic layer 130 includes four layers 1301, 1302, 1303 and1304, where the layer 1304 is in contact with the tunneling barrierlayer 135 and the layer 1301 is in contact with the antiferromagneticlayer 125. In some embodiments, the layer 1301 (the bottommost layer)includes a multilayer structure of cobalt (Co) and platinum (Pt). Insome embodiments, a thickness of the cobalt layer is in a range fromabout 0.3 nm to about 0.6 nm and a thickness of the platinum layer is ina range from about 0.2 nm to about 0.5 nm. The thickness of the cobaltlayer can be the same as or greater than the platinum layer. The cobaltlayers and the platinum layers are alternately stacked such that thetotal thickness of the layer 1301 is in a range from about 2.0 nm toabout 5.0 nm in some embodiments. The layer 1302 includes a cobalt layerhaving a thickness in a range from about 0.4 nm to about 0.6 nm. Incertain embodiments, the layer 1301 includes the cobalt layer and thelayer 1302 is the multilayer of the cobalt layers and the platinumlayers as set forth above. In this disclosure, an “element” layergenerally means that the content of the “element” is more than 99%.

The layer 1303 is a spacer layer. The thickness of the spacer layer 1303is in a range from about 0.2 nm to about 0.5 nm in some embodiments. Thelayer 1304 includes a cobalt iron boron (CoFeB) layer, acobalt/palladium (CoPd) layer and/or a cobalt iron (CoFe) layer.

The thickness of the layer 1304 is in a range from about 0.8 nm to about1.5 nm in some embodiments.

The first pinned magnetic layer 120 includes multiple layers of magneticmaterials. In some embodiments, as shown in FIG. 2B, the first pinnedmagnetic layer 120 includes two layers 1201 and 1202, where the layer1202 is in contact with the antiferromagnetic layer 125. In someembodiments, the layer 1201 includes a multilayer structure of cobalt(Co) and platinum (Pt). In some embodiments, a thickness of the cobaltlayer is in a range from about 0.3 nm to about 0.6 nm and a thickness ofthe platinum layer is in a range from about 0.2 nm to about 0.5 nm. Thethickness of the cobalt layer can be the same as or greater than theplatinum layer. The cobalt layers and the platinum layers arealternately stacked such that the total thickness of the layer 1201 isin a range from about 5.0 nm to about 10.0 nm in some embodiments. Thelayer 1202 includes a cobalt layer having a thickness in a range fromabout 0.4 nm to about 0.6 nm.

The free magnetic layer 140 includes a cobalt iron boron (CoFeB) layer,a cobalt/palladium (CoPd) layer and/or a cobalt iron (CoFe) layer havinga thickness in a range from about 1.0 nm to about 2.0 nm in someembodiments. In other embodiments, the free magnetic layer 140 includesmultiple layers of magnetic materials. In some embodiments, as shown inFIG. 2C, the free magnetic layer 140 includes three layers 1401, 1402and 1403, where the layer 1401 is in contact with the tunneling barrierlayer 135. The layers 1401 and 1403 are a cobalt iron boron (CoFeB)layer, a cobalt/palladium (CoPd) layer and/or a cobalt iron (CoFe) layerhaving a thickness in a range from about 1.0 nm to about 2.0 nm in someembodiments. The layer 1402 is a spacer layer. The thickness of thespacer layer 1402 is in a range from about 0.2 nm to about 0.6 nm insome embodiments.

The MTJ functional layer 101 further includes a seed layer 115 formed onthe first electrode layer 110, a capping layer 145 formed on the freemagnetic layer 140, and a diffusion barrier layer 150 formed on thecapping layer 145, as shown in FIG. 1B. The capping layer 145 includes adielectric material, such as magnesium oxide or aluminum oxide, and hasa thickness in a range from about 0.5 nm to about 1.5 nm in someembodiments. The first electrode layer 110 includes a conductivematerial, such as a metal (e.g., Ta, Mo, Co, Pt, Ni), to reduce theresistance of the first pinned magnetic layer 120, especially forprogramming. The second electrode layer 155 also includes a conductivematerial, such as a metal, to reduce the resistivity during reading.

The pinned magnetic layer, the free magnetic layer and theantiferromagnetic layer can also be formed by physical vapor deposition(PVD), molecular beam epitaxy (MBE), pulsed laser deposition (PLD),atomic layer deposition (ALD), electron beam (e-beam) epitaxy, chemicalvapor deposition (CVD), or derivative CVD processes further comprisinglow pressure CVD (LPCVD), ultrahigh vacuum CVD (UHVCVD), reducedpressure CVD (RPCVD), or any combinations thereof, or any other suitablefilm deposition method. The tunneling barrier layer and the diffusionbarrier layer can also be formed by CVD, PVD or ALD or any othersuitable film deposition method.

FIGS. 3A-3D show a memory operation of MTJ cell. As shown in FIGS.3A-3D, the MTJ cell includes a pinned magnetic layer 10, a tunnelingbarrier layer 15 and a free magnetic layer 20. The pinned magnetic layer10 corresponds to the second pinned magnetic layer 130 or thecombination of the first pinned magnetic layer 120, theantiferromagnetic layer 125 and the second pinned magnetic layer 130 ofFIG. 1B. The tunneling barrier layer 15 corresponds to the tunnelingbarrier layer 135 of FIG. 1B and the free magnetic layer 20 correspondsto the free magnetic layer 140 of FIG. 1B. In FIGS. 3A-3D, the remaininglayers are omitted. A current source 30 is coupled to the MTJ structurein series.

In FIG. 3A, the pinned magnetic layer 10 and the free magnetic layer 20are magnetically oriented in opposite directions. In some embodiments,the spin directions of the pinned magnetic layer 10 and the freemagnetic layer 20 are parallel to the film stack direction(perpendicular to the surface of the films). In FIG. 3B, the pinnedmagnetic layer 10 and the free magnetic layer 20 are magneticallyoriented in the same direction. In other embodiments, the spindirections of the pinned magnetic layer 10 and the free magnetic layer20 are perpendicular to the film stack direction (parallel with thesurface of the films), as shown in FIGS. 3C and 3D. In FIG. 3C, thepinned magnetic layer 10 and the free magnetic layer 20 are magneticallyoriented in opposite directions, while in FIG. 3D, the pinned magneticlayer 10 and the free magnetic layer 20 are magnetically oriented in thesame direction.

If the same current value I_(C) is forced to flow through the MTJ cellby the current source 30, it is found that the cell voltage V₁ in thecase of FIG. 3A (or FIG. 3C) is larger than the cell voltage V₂ in thecase of FIG. 3B (or FIG. 3D), because the resistance of anopposite-oriented MTJ cell shown in FIG. 3A (or FIG. 3C) is greater thanthe resistance of a same-oriented MTJ cell shown in FIG. 3B (or FIG.3D). Binary logic data (“0” and “1”) can be stored in a MTJ cell andretrieved based on the cell orientation and resulting resistance.Further, since the stored data does not require a storage energy source,the cell is non-volatile.

FIG. 4A shows a schematic circuit diagram of an MTJ MRAM array 50. Eachmemory cell includes a MTJ cell Mc and a transistor Tr, such as a MOSFET. The gate of the transistor Tr is coupled to one of word lines WL₁ .. . WL_(m) and a drain (or a source) of the transistor Tr is coupled toone end of the MTJ cell Mc, and another end of the MTJ cell is coupledto one of bit lines BL_(n), BL_(n+1) and BL_(n+2). Further, in someembodiments, signal lines (not shown) for programming are providedadjacent to the MTJ cells.

A memory cell is read by asserting the word line of that cell, forcing areading current through the bit line of that cell, and then measuringthe voltage on that bit line. For example, to read the state of a targetMTJ cell, the word line is asserted to turn ON the transistor Tr. Thefree magnetic layer of the target MTJ cell is thereby coupled to one ofthe fixed potential lines SL_(n), SL_(n+1) and SL_(n+2), e.g., theground, through the transistor Tr. Next, the reading current is forcedon the bit line. Since only the given reading transistor Tr is turnedON, the reading current flows through the target MTJ cell to the ground.The voltage of the bit line then measured to determine the state (“0” or“1”) of the target MTJ cell. In some embodiments, as shown in FIG. 4A,each MTJ cell has one reading transistor Tr. Therefore, this type ofMRAM architecture is called 1T1R. In other embodiments, two transistorsare assigned to one MTJ cell, forming a 2T1R system. Other cell arrayconfigurations can be employed.

FIG. 4B shows a schematic perspective view of a memory cell of the MTJMRAM and FIG. 4C shows a memory cell layout of the MTJ MRAM.

As shown in FIGS. 4B and 4C, the MTJ cell MTJ is disposed above aswitching device SW, such as a MOS FET. The gate Gate of the MOSFET is aword line WL or coupled to a word line formed by a metal layer. Thebottom electrode Mx of the MTJ cell is coupled to a drain of the MOS FETformed in an active region AR and a source of the MOS FET formed in theactive region AR is coupled to the source line SL. The upper electrodeof the MTJ cell is coupled to a bit line BL. In some embodiments, thesource line SL can be formed by metal layers M1 and M2, and the bit lineBL can be formed by a metal layer M3. In certain embodiments, one ofmore metal wirings is a single device layer, and in other embodiments,one or more metal wirings are double or more device layers.

FIG. 5 shows a cross sectional view of a MTJ MRAM according to anembodiment of the present disclosure. Material, configuration,dimensions and/or processes the same as or similar to the foregoingembodiments described with FIGS. 1A-4C may be employed in the followingembodiments, and detailed explanation thereof may be omitted.

As shown in FIG. 5 , the MTJ cells of an MRAM are disposed over asubstrate 201. In some embodiments, the substrate 201 includes asuitable elemental semiconductor, such as silicon, diamond or germanium;a suitable alloy or compound semiconductor, such as Group-IV compoundsemiconductors (silicon germanium (SiGe), silicon carbide (SiC), silicongermanium carbide (SiGeC), GeSn, SiSn, SiGeSn), Group III-V compoundsemiconductors (e.g., gallium arsenide (GaAs), indium gallium arsenide(InGaAs), indium arsenide (InAs), indium phosphide (InP), indiumantimonide (InSb), gallium arsenic phosphide (GaAsP), or gallium indiumphosphide (GaInP)), or the like. Further, the substrate 201 may includean epitaxial layer (epi-layer), which may be strained for performanceenhancement, and/or may include a silicon-on-insulator (SOI) structure.

Various electronic devices (not shown), such as transistors (e.g., MOSFET), are disposed on the substrate 201. The MOS FET may include aplanar MOS FET, a fin FET and/or a gate-all-around FET. A firstinterlayer dielectric (ILD) layer 210 is disposed over the substrate 201to cover the electronic devices. The first ILD layer 210 may be referredto as an inter-metal dielectric (IMD) layer. The first ILD layer 210includes one or more dielectric layers, such as silicon oxide, siliconnitride, silicon oxynitride, fluorine-doped silicate glass (FSG), low-kdielectrics such as carbon doped oxides, extremely low-k dielectricssuch as porous carbon doped silicon dioxide, a polymer such aspolyimide, combinations of these, or the like. In some embodiments, thefirst ILD layer 210 is formed through a process such as CVD, flowableCVD (FCVD), or a spin-on-glass process, although any acceptable processmay be utilized. Subsequently, a planarization process, such as chemicalmechanical polishing (CMP) and/or an etch-back process, or the like isperformed.

Further, a lower metal wiring 213 is formed by, for example, a damasceneprocess. The lower metal wiring 213 includes one or more layers ofconductive material, such as Cu, a Cu alloy, Al or any other suitableconductive materials. Each of the MTJ cells is disposed over the lowermetal wiring 215, as shown in FIG. 5 . Although FIG. 5 shows three MTJcells, the number of the MTJ cells is not limited to three.

As shown in FIG. 5 , a first insulating layer as an etch stop layer 220is formed on the first ILD layer 210. In some embodiments, the firstinsulating layer 220 includes a material different from the first ILDlayer 210 and includes silicon carbide, silicon nitride, aluminum oxideor any other suitable material. The thickness of the first insulatinglayer 220 is in a range from about 10 nm to about 25 nm in someembodiments.

A second ILD layer 225 is formed over the first insulating layer 220.The second ILD layer includes one or more dielectric layers, such assilicon oxide, silicon nitride, silicon oxynitride, fluorine-dopedsilicate glass (FSG), low-k dielectrics such as carbon doped oxides,extremely low-k dielectrics such as porous carbon doped silicon dioxide,a polymer such as polyimide, combinations of these, or the like. In someembodiments, the material for the first ILD layer 210 and the materialfor the second ILD layer 225 are the same. In other embodiments,different dielectric materials are used for the first ILD layer 210 andthe second ILD layer 225.

A via contact 219 is formed in contact with the lower metal wiring 215and passing through the second ILD layer 225 and the first etch stoplayer 220 in some embodiments. In some embodiments, the via contact 219includes a liner layer 215 and a body layer 217. The liner layer 215includes one or more layers of Ti, TiN, Ta or TaN, or other suitablematerial, and the body layer 217 includes one or more layers of W, Cu,Al, Mo, Co, Pt, Ni, and/or an alloy thereof or other suitable material,in some embodiments.

An MRAM cell includes a bottom electrode 254, an MTJ film stack 255 anda top electrode 256, as shown in FIG. 5 . The bottom electrode 254, theMTJ film stack 110 and the top electrode 256 correspond to the firstelectrode 110, the MTJ functional layer 101 and the second electrode 155of FIG. 1B. The MRAM cell structure has a tapered shape as shown in FIG.5 . The width of the MRAM cell structure at the bottom (the bottomelectrode 254) is greater than the width at the top (the top electrode256). The thickness of the bottom electrode 254 is in a range from about5 nm to about 20 nm in some embodiments. The thickness of the MTJ filmstack 255 is in a range from about 15 nm to about 50 nm in someembodiments.

In some embodiments, a first insulating cover layer 227 as a sidewallspacer layer is formed on opposing side walls of the MRAM cellstructure. The first insulating cover layer 227 includes one or morelayers of insulating material. In some embodiments, a nitride-basedinsulating material is used. In certain embodiments, the nitride-basedinsulating material is a silicon nitride-based insulating material, suchas SiON, SiON, SiCN and SiOCN. The thickness T1 of the first insulatingcover layer 227 is in a range from about 5 nm to about 30 nm in someembodiments, and is in a range from about 10 nm to about 20 nm in otherembodiments.

Further, a second insulating cover layer 280 is formed over the firstinsulating cover layer 227. The second insulating cover layer 280includes one or more layers of insulating material different from thefirst insulating cover layer 227. In some embodiments, an aluminum-basedinsulating material is used. In certain embodiments, the aluminum-basedinsulating material includes aluminum oxide, aluminum nitride, aluminumoxynitride, aluminum carbide and/or aluminum oxycarbide. In someembodiments, the concentrations of Al, O, C and/or N in the thicknessdirection are not uniform. In certain embodiments, the concentration ofAl gradually decreases from the bottom to the top of the secondinsulating cover layer 280, while the concentrations of O, C and/or Ngradually increase from the bottom to the top of the second insulatingcover layer 280. The thickness T2 of the second insulating cover layer270 is smaller than the thickness T1 of the first insulating cover layerin some embodiments. The thickness T2 is in a range from about 1 nm toabout 10 nm in some embodiments, and is in a range from about 3 nm toabout 5 nm in other embodiments.

Further a third ILD layer 230 is disposed in spaces between the MRAMcell structures. The third ILD layer 230 includes one or more dielectriclayers, such as silicon oxide, silicon nitride, silicon oxynitride,fluorine-doped silicate glass (FSG), low-k dielectrics such as carbondoped oxides, extremely low-k dielectrics such as porous carbon dopedsilicon dioxide, a polymer such as polyimide, combinations of these, orthe like. In some embodiments, the material for the first ILD layer 210,the material for the second ILD layer 225 and the material for the thirdILD layer 230 are the same. In other embodiments, at least two of themare made of different dielectric materials.

Further, a fourth ILD layer is disposed over the third ILD layer 230. Insome embodiments, the fourth ILD layer is a multiple layer structure andincludes a first dielectric layer 235 as an etch stop layer formed onthe third ILD layer 230, a second dielectric layer 237 formed on thefirst dielectric layer 235 and a third dielectric layer 240 formed onthe second dielectric layer. In other embodiments, the fourth ILD layeris a two-layer structure without one of the first or second dielectriclayers.

In some embodiments, the first dielectric layer 235 and seconddielectric layer 237 are made of different material than the thirddielectric layer 240 and include one or more layers of SiN (Si₃N₄),SiON, SiOCN, SiCN, SiC or any other suitable material. In someembodiments, the first dielectric layer 235 and second dielectric layer237 are made of different materials from each other.

The third dielectric layer 240 includes one or more dielectric layers,such as silicon oxide, silicon nitride, silicon oxynitride,fluorine-doped silicate glass (FSG), low-k dielectrics such as carbondoped oxides, extremely low-k dielectrics such as porous carbon dopedsilicon dioxide, a polymer such as polyimide, combinations of these, orthe like.

In some embodiments, the material for the first ILD layer 210, thematerial for the second ILD layer 225, the material for the third ILDlayer 230 and the material for the third dielectric layer 240 are thesame. In other embodiments, at least two of them are made of differentdielectric materials. The thickness of the third dielectric layer 240 isgreater than the thicknesses of the first and second dielectric layers235 and 237 in some embodiments.

A conductive contact 245 is formed in contact with the top electrode256, as shown in FIG. 5 . The conductive contact 245 is the same as orsimilar to the lower metal wiring 213 and/or the via contact 219 and ismade of, for example, Cu, Al, Ta, Ti, Mo, Co, Pt, Ni, W, TiN and/or TaNand/or an alloy thereof or other suitable material.

As shown in FIG. 5 , the upper surface of the top electrode 256 issubstantially flush with the upper surfaces of the first insulatingcover layer 227 and/or the second insulating cover layer 280 in someembodiments.

FIGS. 6A-11F show various stages of a sequential manufacturing processof the semiconductor device including an MRAM according to an embodimentof the present disclosure. It is understood that additional operationscan be provided before, during, and after processes shown by FIGS.6A-11F, and some of the operations described below can be replaced oreliminated, for additional embodiments of the method. Material,configuration, dimensions and/or processes the same as or similar to theforegoing embodiments described with FIGS. 1A-5 may be employed in thefollowing embodiments, and detailed explanation thereof may be omitted.

As shown in FIG. 6A, lower metal wirings 213 are formed in the first ILDlayer 210 over the substrate 201. In some embodiments, via contacts 207are provided under the lower metal wirings 213. Then, as shown in FIG.6B, a first insulating layer as an etch stop layer 220 is formed overthe structure of FIG. 6A, and a second ILD layer 225 is formed over thefirst insulating layer 220. Further, as shown in FIG. 6B, via contactopenings 222 are formed to expose the upper surface of the lower metalwirings 213, by using one or more lithography and etching operations.Subsequently, via contact 219 including layers 215 and 217 are formed,as shown in FIG. 6C. One or more film forming operations, such as CVD,PVD including sputtering, ALD, electro-chemical plating and/orelectro-plating, are performed, and a planarization operation, such asCMP, is performed to fabricate the via contacts 219.

Then, as shown in FIG. 7A, a first conductive layer 254A for the bottomelectrode 254, a stacked layer 255A for the MTJ film stack 255 and asecond conductive layer 256A for the top electrode 256 are sequentiallyformed. In some embodiments, a layer 300 for a hard mask is furtherformed on the second conductive layer 256A.

By using one or more lithography and etching operations, the film stackshown in FIG. 7A is patterned into an MRAM cell structure including thebottom electrode 254, the MTJ film stack 255 and the top electrode 256,as shown in FIG. 7B. In some embodiments, after the patterning thesecond conductive layer 256A, the stacked layer 255A and the firstconductive layer 256A, the second ILD layer 225 is partially recessed.The amount D1 of the recess is in a range from about 1 nm to about 30 nmin some embodiments.

Subsequently, as shown in FIG. 8A, a first insulating cover layer 227 isformed to cover the MRAM cell structure. The first insulating coverlayer 227 can be formed by CVD, PVD or ALD or any other suitable filmdeposition method. In some embodiments, the first insulating cover layer227 is formed by CVD, PVD or ALD at a lower temperature range less thanabout 150° C., such as a range from about 100° C. to about 150° C. Whenthe first insulating cover layer 227 is formed at a higher temperature,such as a range from about 200° C. to about 300° C. (or more), the filmformation process may cause damage to the MTJ film stack 255 since thefirst insulating cover layer is directly formed on the MTJ film stack255. As shown in FIG. 8A, the first insulating cover layer 227 isconformally formed.

Then, as shown in FIG. 8B, a second insulating cover layer 280 is formedto cover the MRAM cell structure. The second insulating cover layer 280can be formed by CVD, PVD or ALD or any other suitable film depositionmethod. As shown in FIG. 8B, the second insulating cover layer 280 isconformally formed. As set forth above, the second insulating coverlayer 280 includes an aluminum-based insulating material in someembodiments. The aluminum-based insulating material, such as AlO(Al₂O₃), AlN, AlC, AlOC and AlON, can be formed by the followingoperations. First, an aluminum layer is formed on the first insulatingcover 227. The aluminum layer is formed by, for example, metal-organicCVD (MOCVD) or ALD using tri-methyl-aluminum (TMA). Then, a plasmatreatment using NH₃, CO₂ and/or CO gases is performed over the aluminumlayer, to convert the aluminum layer into AlO, AlN, AlC, AlOC or AlON.The concentrations of Al, O, C and/or N in the plasma treated aluminumlayer are not uniform, in particular, along the vertical direction. TheAlON layer may be made of two layers of AlO and AlN. In someembodiments, a thin layer of aluminum having a thickness of less thanabout 1 nm remains at the bottom of the layer. A chemical oxidation ofthe aluminum layer using an oxidation solution may be employed. In someembodiments, the AlO, AlOC, AlC, and/or AlON layer can be directlyformed by CVD, PVD or ALD or other suitable method by using appropriatesource gases. In some embodiments, the second insulating cover layer 280is formed by CVD, PVD or ALD at a temperature range in a range fromabout 300° C. to about 450° C. Although lower forming temperature (e.g.,less than 300° C.) may be employed, since there is the first insulatingcover layer 227 is formed to cover the MTJ film stack 255, a higherforming temperature (about 300° C. to about 450° C.) may not damage theMTJ film stack 255.

Next, as shown in FIG. 9A, a dielectric material layer 230A for thethird ILD layer 230 is formed to fully cover the second insulating coverlayer 280. In some embodiments, an etch-back operation is performed onthe dielectric material layer 230A, and then a CMP operation isperformed, as shown in FIG. 9B. Because the selectivity for the CMPoperation between the second insulating cover layer 280 and the thirdILD layer 230 is high, the CMP operation can utilize the secondinsulating cover layer 280 as a stop layer. When the CMP operation stopsat the upper surface of the second insulating cover layer 280, it ispossible to prevent over-etching of the third ILD layer 230, and thusthe upper surface of the second insulating cover layer 280 above theMRAM cell structure is substantially flush with the upper surfaces ofthe third ILD layer 230 in some embodiments.

Subsequently, as shown in FIG. 10A, a fourth ILD layer including a firstdielectric layer 235, a second dielectric layer 237 and a thirddielectric layer 240 is formed over the structure of FIG. 9B. Thedielectric layers of the fourth ILD layer can be formed by CVD, PVD orALD or other suitable film formation method. In some embodiments, thethird dielectric layer 240 is formed through a process such as CVD,flowable CVD (FCVD), or a spin-on-glass process, although any acceptableprocess may be utilized. Subsequently, a planarization process, such aschemical mechanical polishing (CMP) and/or an etch-back process, or thelike is performed.

Then, as shown in FIG. 10B, contact openings 242 are formed by using oneor more lithography and etching operations. Because the selectivity inthe etching operation between the second insulating cover layer 280 andthe fourth ILD layer is high, the etching operation can utilize thesecond insulating cover layer 280 as an etch stop layer.

Next, as shown in FIGS. 11A and 11B, a part of the second insulatingcover layer 280 and a part of the first insulating cover layer 227 areremoved by dry and/or wet etching, thereby exposing the top electrode256. In some embodiments, part of the second insulating cover layer 280is removed, and then part of the first insulating cover layer 227 isremoved. In some embodiments, one or more wet etching operation is used.In certain embodiments, a wet etching operation is performed to removethe second insulating cover layer 280 and a dry etching operation isperformed to remove first insulating cover layer 227. As set forthabove, the second insulating cover layer 280 is made at a highertemperature than the first insulating cover layer 227, and thus thesecond insulating cover layer 280 is a “hard” layer in a dry etchingoperation. Accordingly, it is advantageous to use a wet etching toremove the second insulating cover layer 280. In contrast, the firstinsulating cover layer is made at a low temperature and thus is a “soft”layer in a dry etching operation. Thus, a dry etching operation can beutilized to remove the first insulating cover layer 227 with suppressingdamage on the top electrode 256. In other embodiments, a wet etchingoperation is also performed to remove the first insulating cover layer227. By using wet etching, it is possible to suppress damage to the MTJfilm stack 255.

Subsequently, as shown in FIG. 11B, the contact openings 242 are filledwith a conductive material so as to form conductive contacts 245contacting the exposed top electrode 256. In some embodiments, duringthe etching of the first and/or second insulating cover layers, thethird ILD layer 230 and/or the first dielectric layer 235 is/are alsoslightly laterally etched. When the third ILD layer 230 is laterallyetched, as shown in FIG. 11C, the bottom portion of the conductivecontact 245 has a broader width than the upper portion as shown in FIG.11D. In some embodiments, the amount of the lateral etching of the thirdILD layer 230 is in a range from about 1 nm to about 2 nm. When thefirst dielectric layer 235 is laterally etched, as shown in FIG. 11E,the conductive contact 245 has a protrusion on its side faces as shownin FIG. 11E. In some embodiments, the amount of the lateral etching ofthe first dielectric layer 235 is in a range from about 1 nm to about 2nm.

It is understood that the device shown in FIG. 11B undergoes furthersemiconductor processes to form various features such as interconnectmetal layers, dielectric layers, passivation layers, etc.

FIGS. 12A and 12B show various stages of a sequential manufacturingprocess of the semiconductor device including an MRAM according toanother embodiment of the present disclosure. Material, configuration,dimensions and/or processes the same as or similar to the foregoingembodiments described with FIGS. 1A-11B may be employed in the followingembodiments, and detailed explanation thereof may be omitted.

In FIG. 11A, the upper surface of the top electrode 256 is substantiallyflush with the upper surfaces of the first insulating cover layer 227and the second insulating cover layer 280. In the embodiments shown byFIGS. 12A and 12B, the upper surface of the top electrode 256 is notflush with at least one of the upper surfaces of the first insulatingcover layer 227 and the second insulating cover layer 280. In someembodiments, the upper surface of the top electrode 256 is higher thanthe upper surfaces of the first insulating cover layer 227 and thesecond insulating cover layer 280. This structure can be obtained byover-etching the first insulating cover layer 227 below the uppersurface of the top electrode 256. In other words, a vertical level of anupper surface of the top electrode 256 is higher than a vertical levelof an upper surface of the first insulating cover layer 227 and avertical level of an upper surface of the second insulating cover layer280, measured from the substrate. A difference D2 between the uppersurface of the top electrode 256 and the upper surface of the firstinsulating cover layer 227 is more than 0 nm and less than about 20 nmin some embodiments, and is more than 0 nm and less than about 10 nm inother embodiments. A difference D3 between the upper surface of the topelectrode 256 and the upper surface of the second insulating cover layer280 is more than 0 nm and less than about 10 nm in some embodiments, andis more than 0 nm and less than about 5 nm in other embodiments. In someembodiments, D3 is smaller than D2. In certain embodiments, D3 is equalto or larger than D2. Further, in some embodiments, a difference D4between the upper surface of the first insulating cover layer 227 andthe interface between the MTJ film stack 255 and the top electrode 256is more than 10 nm in some embodiments, and is more than 20 nm in otherembodiments, where D2+D4 is equal to the thickness of the top electrode256. In other words, sidewalls of the MTJ film stack 255 is fullycovered by the first insulating cover layer 227.

FIGS. 13A and 13B show various stages of a sequential manufacturingprocess of the semiconductor device including an MRAM according toanother embodiment of the present disclosure. Material, configuration,dimensions and/or processes the same as or similar to the foregoingembodiments described with FIGS. 1A-12B may be employed in the followingembodiments, and detailed explanation thereof may be omitted.

Similar to FIGS. 12A and 12B, in the embodiments shown by FIGS. 13A and13B, the upper surface of the top electrode 256 is not flush with atleast one of the upper surfaces of the first insulating cover layer 227and the second insulating cover layer 280.

In some embodiments, the upper surface of the top electrode 256 ishigher than the upper surface of the first insulating cover layer 227and lower than the upper surface of the second insulating cover layer280. In other words, a vertical level of an upper surface of the topelectrode 256 is higher than a vertical level of an upper surface of thefirst insulating cover layer 227 and lower than a vertical level of anupper surface of the second insulating cover layer 280, measured fromthe substrate. A difference D2 between the upper surface of the topelectrode 256 and the upper surface of the first insulating cover layer227 is more than 0 nm and less than about 20 nm in some embodiments, andis more than 0 nm and less than about 10 nm in other embodiments. Adifference D5 between the upper surface of the top electrode 256 and theupper surface of the second insulating cover layer 280 is more than 0 nmand less than about 15 nm in some embodiments, and is more than 0 nm andless than about 5 nm in other embodiments. Further, in some embodiments,a difference D4 between the upper surface of the first insulating coverlayer 227 and the interface between the MTJ film stack 255 and the topelectrode 256 is more than 10 nm in some embodiments, and is more than20 nm in other embodiments, where D2+D4 is equal to the thickness of thetop electrode 256. In other words, sidewalls of the MTJ film stack 255is fully covered by the first insulating cover layer 227.

FIGS. 14A and 14B show various stages of a sequential manufacturingprocess of the semiconductor device including an MRAM according toanother embodiment of the present disclosure. Material, configuration,dimensions and/or processes the same as or similar to the foregoingembodiments described with FIGS. 1A-13B may be employed in the followingembodiments, and detailed explanation thereof may be omitted.

When the second insulating cover layer 280 is over-etched, the uppersurface of the second insulating cover layer is located lower than atleast one of the upper surface of the top electrode 226 and the uppersurface of the first insulating cover layer 227.

It will be understood that not all advantages have been necessarilydiscussed herein, no particular advantage is required for allembodiments or examples, and other embodiments or examples may offerdifferent advantages.

For example, in the present disclosure, by using the first and secondinsulating cover layers made of different materials, it is possible toselectively remove the layers, and thus to prevent damage on the MTJfilm stack.

In accordance with an aspect of the present disclosure, in a method ofmanufacturing a semiconductor device, a magnetic random access memory(MRAM) cell structure is formed. The MRAM cell structure includes abottom electrode, a magnetic tunnel junction (MTJ) stack and a topelectrode. A first insulating cover layer is formed over the MRAM cellstructure. A second insulating cover layer is formed over the firstinsulating cover layer. An interlayer dielectric (ILD) layer is formed.A contact opening in the ILD layer is formed, thereby exposing thesecond insulating cover layer. A part of the second insulating coverlayer and a part of the first insulating cover layer are removed,thereby exposing the top electrode. A conductive layer is formed in theopening contacting the top electrode. In one or more of the foregoingand following embodiments, the first insulating cover layer is made of anitride-based insulating material, and the second insulating cover layeris made of an aluminum-based insulating material different from thenitride-based insulating material. In one or more of the foregoing andfollowing embodiments, the nitride-based insulating material is one ormore selected from the group consisting of SiN, SiON and SiOCN. In oneor more of the foregoing and following embodiments, the nitride-basedinsulating material is formed at a temperature in a range from 100° C.to 150° C. In one or more of the foregoing and following embodiments,the aluminum-based insulating material is one or more selected from thegroup consisting of aluminum oxide, aluminum nitride, aluminumoxynitride, aluminum carbide and aluminum oxycarbide. In one or more ofthe foregoing and following embodiments, the aluminum-based insulatingmaterial is formed at a temperature in a range from 300° C. to 450° C.In one or more of the foregoing and following embodiments, the firstinsulating cover layer is thicker than the second insulating coverlayer. In one or more of the foregoing and following embodiments, theILD layer includes a bottom ILD layer and a upper ILD layer, and theopening is formed by etching the upper ILD layer. In one or more of theforegoing and following embodiments, the upper ILD layer includes two ormore dielectric layers. In one or more of the foregoing and followingembodiments, the forming the ILD layer includes forming a dielectricmaterial for the bottom ILD layer over the second insulating coverlayer, planarizing the dielectric material to expose the secondinsulating cover layer, thereby forming the bottom ILD layer, andforming the two or more dielectric layers on the bottom ILD layer andthe second insulating cover layer. In one or more of the foregoing andfollowing embodiments, after the part of the second insulating coverlayer and the part of the first insulating cover layer are removed, avertical level of an upper surface of the top electrode is higher than avertical level of an upper surface of the first insulating cover layer.In one or more of the foregoing and following embodiments, after thepart of the second insulating cover layer and the part of the firstinsulating cover layer are removed, a vertical level of an upper surfaceof the second insulating cover layer is higher than the vertical levelof the upper surface of the first insulating cover layer. In one or moreof the foregoing and following embodiments, after the part of the secondinsulating cover layer and the part of the first insulating cover layerare removed, a vertical level of an upper surface of the secondinsulating cover layer is higher than the vertical level of the uppersurface of the top electrode.

In accordance with another aspect of the present disclosure, in a methodof manufacturing a semiconductor device, the semiconductor deviceincludes a magnetic random access memory (MRAM) cell. In the method, afirst conductive layer is formed over a first interlayer dielectric(ILD) layer. A stacked layer for a magnetic tunnel junction (MTJ) stackis formed over the first conductive layer. A second conductive layer isformed over the stacked layer. The second conductive layer, the stackedlayer and the first conductive layer are patterned, thereby forming anMRAM cell structure including a bottom electrode formed by the firstconductive layer, the magnetic tunnel junction (MTJ) stack and a topelectrode formed by the second conductive layer. A first insulatingcover layer is formed over the MRAM cell structure. A second insulatingcover layer is formed over the first insulating cover layer. A secondILD layer is formed. A contact opening is formed in the second ILDlayer, thereby exposing the second insulating cover layer. A part of thesecond insulating cover layer and a part of the first insulating coverlayer are removed, thereby exposing the top electrode. A thirdconductive layer is formed in the opening contacting the top electrode.In one or more of the foregoing and following embodiments, after thepatterning the second conductive layer, the stacked layer and the firstconductive layer, the first ILD layer is partially recessed. In one ormore of the foregoing and following embodiments, a bottom of the firstinsulating cover layer is located below a bottom of the bottomelectrode. In one or more of the foregoing and following embodiments,the first insulating cover layer is made of SiN. In one or more of theforegoing and following embodiments, a side face of the contact openingincludes a laterally etched portion. In one or more of the foregoing andfollowing embodiments, the first insulating cover layer is formed at atemperature in a range from 100° C. to 150° C. In one or more of theforegoing and following embodiments, the second insulating cover layeris made of one or more selected from the group consisting of aluminumoxide, aluminum nitride, aluminum oxynitride, aluminum carbide andaluminum oxycarbide.

In accordance with another aspect of the present disclosure, in a methodof manufacturing a semiconductor device, a magnetic random access memory(MRAM) cell structure is formed. The MRAM cell structure includes abottom electrode, a magnetic tunnel junction (MTJ) stack and a topelectrode. A first insulating cover layer is formed over the MRAM cellstructure. A second insulating cover layer is formed over the firstinsulating cover layer. A dielectric material is formed to fully coverthe second insulating cover layer. A chemical mechanical polishingoperation is performed on the dielectric material to expose a part ofthe second insulating cover layer above the MRAM cell structure and notto expose the first insulating cover layer. An interlayer dielectric(ILD) layer is formed over the second insulating cover layer and thedielectric material. A contact opening is formed in the ILD layer,thereby exposing the second insulating cover layer. A part of the secondinsulating cover layer and a part of the first insulating cover layerare removed, thereby exposing the top electrode. A conductive layer isformed in the opening contacting the top electrode.

In accordance with one aspect of the present disclosure, a semiconductordevice includes a magnetic random access memory (MRAM) cell. Thesemiconductor device includes a magnetic random access memory (MRAM)cell structure disposed over a substrate, where the MRAM cell structureincludes a bottom electrode, a magnetic tunnel junction (MTJ) stack anda top electrode, a first insulating cover layer covering sidewalls ofthe MRAM cell structure, a second insulating cover layer disposed overthe first insulating cover layer, a dielectric layer, and a conductivecontact in contact with the top electrode. The first insulating coverlayer is made of a nitride-based insulating material, and the secondinsulating cover layer is made of an aluminum-based insulating materialdifferent from the nitride-based insulating material. In one or more ofthe foregoing and following embodiments, the nitride-based insulatingmaterial is one or more selected from the group consisting of SiN, SiONand SiOCN. In one or more of the foregoing and following embodiments,the aluminum-based insulating material is one or more selected from thegroup consisting of aluminum oxide, aluminum nitride, aluminumoxynitride, aluminum carbide and aluminum oxycarbide. In one or more ofthe foregoing and following embodiments, the nitride-based insulatingmaterial is made of SiN, and the aluminum-based insulating material isone selected from the group consisting of aluminum oxide, aluminumnitride, aluminum oxynitride. In one or more of the foregoing andfollowing embodiments, the first insulating cover layer is thicker thanthe second insulating cover layer. In one or more of the foregoing andfollowing embodiments, the dielectric layer includes multiple layers,and the conductive contact passes through the multiple layers. In one ormore of the foregoing and following embodiments, a vertical level of anupper surface of the top electrode from the substrate is higher than avertical level of an upper surface of the first insulating cover layerfrom the substrate. In one or more of the foregoing and followingembodiments, a vertical level of an upper surface of the secondinsulating cover layer from the substrate is higher than the verticallevel of the upper surface of the first insulating cover layer. In oneor more of the foregoing and following embodiments, a vertical level ofan upper surface of the second insulating cover layer from the substrateis higher than the vertical level of the upper surface of the topelectrode. In one or more of the foregoing and following embodiments,the MRAM cell structure has a tapered cross section having a smallerwidth at a top and a larger width at a bottom.

In accordance with another aspect of the present disclosure, asemiconductor device includes a magnetic random access memory (MRAM)cell. The semiconductor device includes magnetic random access memory(MRAM) cell structures disposed over a substrate, where each of the MRAMcell structure includes a bottom electrode, a magnetic tunnel junction(MTJ) stack and a top electrode, a first insulating cover layer coveringsidewalls of each of the MRAM cell structures, a second insulating coverlayer disposed over the first insulating cover layer, a bottomdielectric layer filling a space between adjacent MRAM cell structures,an upper dielectric layer disposed over the bottom dielectric layer, anda conductive contact in contact with the top electrode of each of theMRAM cell structures. The first insulating cover layer is made of anitride-based insulating material, and the second insulating cover layeris made of an aluminum-based insulating material different from thenitride-based insulating material. In one or more of the foregoing andfollowing embodiments, the nitride-based insulating material is one ormore selected from the group consisting of SiN, SiON and SiOCN. In oneor more of the foregoing and following embodiments, the aluminum-basedinsulating material is one or more selected from the group consisting ofone or more selected from the group consisting of aluminum oxide,aluminum nitride, aluminum oxynitride. In one or more of the foregoingand following embodiments, the first insulating cover layer is thickerthan the second insulating cover layer. In one or more of the foregoingand following embodiments, the upper dielectric layer includes multiplelayers, and the conductive contact passes through the multiple layers.In one or more of the foregoing and following embodiments, a verticallevel of an upper surface of the top electrode from the substrate ishigher than a vertical level of an upper surface of the first insulatingcover layer from the substrate. In one or more of the foregoing andfollowing embodiments, a vertical level of an upper surface of thesecond insulating cover layer from the substrate is higher than thevertical level of the upper surface of the first insulating cover layer.In one or more of the foregoing and following embodiments, a verticallevel of an upper surface of the second insulating cover layer from thesubstrate is higher than the vertical level of the upper surface of thetop electrode. In one or more of the foregoing and followingembodiments, each of the MRAM cell structures has a tapered crosssection having a smaller width at a top and a larger width at a bottom.

In accordance with another aspect of the present disclosure, asemiconductor device includes a magnetic random access memory (MRAM)cell. The semiconductor device includes a first interlayer dielectric(ILD) layer disposed over a substrate, a via contact disposed in thefirst ILD layer, a magnetic random access memory (MRAM) cell structurein contact with the via contact, where the MRAM cell structure includesa bottom electrode, a magnetic tunnel junction (MTJ) stack and a topelectrode, a first insulating cover layer covering sidewalls of the MRAMcell structure, a second insulating cover layer disposed over the firstinsulating cover layer, a dielectric layer, and a conductive contact incontact with the top electrode. The first insulating cover layer is madeof a nitride-based insulating material, and the second insulating coverlayer is made of an aluminum-based insulating material different fromthe nitride-based insulating material.

The foregoing outlines features of several embodiments or examples sothat those skilled in the art may better understand the aspects of thepresent disclosure. Those skilled in the art should appreciate that theymay readily use the present disclosure as a basis for designing ormodifying other processes and structures for carrying out the samepurposes and/or achieving the same advantages of the embodiments orexamples introduced herein. Those skilled in the art should also realizethat such equivalent constructions do not depart from the spirit andscope of the present disclosure, and that they may make various changes,substitutions, and alterations herein without departing from the spiritand scope of the present disclosure.

What is claimed is:
 1. A method of manufacturing a semiconductor device, the method comprising: forming a magnetic random access memory (MRAM) cell structure including a bottom electrode, a magnetic tunnel junction (MTJ) stack and a top electrode; forming a first dielectric layer over the MRAM cell structure; forming a lower interlayer dielectric (ILD) layer over the first insulating layer; performing a planarization operation on the lower ILD layer to expose the first insulating layer without exposing an underlying layer below the first insulating layer; forming an upper ILD layer on the planarized lower ILD layer and the exposed first insulating layer; forming a contact opening in the upper ILD layer, thereby exposing the first insulating layer; removing at least a part of the first insulating layer, thereby exposing the top electrode within the contact opening; and forming a conductive layer in the contact opening contacting the top electrode, wherein: the first insulating layer is made of one or more selected from the group consisting of aluminum carbide and aluminum oxycarbide.
 2. The method of claim 1, further comprising: before the first insulating layer is formed, forming a second insulating layer over the MRAM cell structure to cover side faces of the bottom electrode, the MTJ stack and the top electrode and a top face of the top electrode, wherein the second insulating layer is made of a nitride-based insulating material.
 3. The method of claim 2, wherein the nitride-based insulating material is one or more selected from the group consisting of SiN, SiON and SiOCN.
 4. The method of claim 3 wherein the nitride-based insulating material is formed by CVD or ALD at a temperature in a range from 100° C. to 150° C.
 5. The method of claim 3, wherein the second insulating layer is thicker than the first insulating layer.
 6. The method of claim 2, wherein the first insulating layer is formed at a temperature in a range from 300° C. to 450° C.
 7. The method of claim 2, wherein: the upper ILD layer includes a first dielectric layer, a second dielectric layer on the first dielectric layer and a third dielectric layer on the second dielectric layer, the first dielectric layer, the second dielectric layer and the third dielectric layer are made of different materials from each other, and one of the first or second dielectric layers includes SiC, SiCN or SiOCN.
 8. The method of claim 7, wherein a thickness of the third dielectric layer is greater than a thickness of the first dielectric layer and a thickness of the second dielectric layer.
 9. The method of claim 7, wherein the third dielectric layer includes a low-k dielectric material.
 10. The method of claim 7, wherein during the contact opening is formed, one of the lower ILD layer or the first dielectric layer is laterally etched.
 11. A semiconductor device including a magnetic random access memory (MRAM) cell, comprising: a magnetic random access memory (MRAM) cell structure disposed over a substrate, the MRAM cell structure including a bottom electrode, a magnetic tunnel junction (MTJ) stack and a top electrode; a first insulating layer disposed over the MRAM cell structure; a first interlayer dielectric (ILD) layer disposed over the first insulating layer; a second ILD layer disposed over the first ILD layer; and a conductive contact in contact with the top electrode, wherein the first insulating layer is made of one or more selected from the group consisting of aluminum carbide and aluminum oxycarbide.
 12. The semiconductor device of claim 11, further comprising a second insulting layer made of a nitride-based insulating material, wherein the insulating layer covers sidewalls of the MRAM cell structure.
 13. The semiconductor device of claim 12, wherein the nitride-based insulating material is one or more selected from the group consisting of SiON and SiOCN.
 14. The semiconductor device of claim 12, wherein the first insulting layer is thinner than the second insulting layer.
 15. The semiconductor device of claim 12, wherein the nitride-based insulating material is SiON.
 16. The semiconductor device of claim 12, wherein: the second ILD layer includes a first dielectric layer, a second dielectric layer on the first dielectric layer and a third dielectric layer on the second dielectric layer, the first dielectric layer, the second dielectric layer and the third dielectric layer are made of different materials from each other, and one of the first or second dielectric layers includes SiC, SiCN or SiOCN, and the conductive contact passes through the first, second and third dielectric layers.
 17. A semiconductor device including a magnetic random access memory (MRAM) cell, comprising: magnetic random access memory (MRAM) cell structures disposed over a substrate, each of the MRAM cell structure including a bottom electrode, a magnetic tunnel junction (MTJ) stack and a top electrode; a first insulating layer disposed over each of the MRAM cell structures; a first interlayer dielectric (ILD) layer filling a space between adjacent MRAM cell structures; a second ILD layer disposed over the first ILD layer; and a conductive contact in contact with the top electrode of each of the MRAM cell structures, wherein: the first insulating layer is made of one or more selected from the group consisting of aluminum oxide, aluminum carbide and aluminum oxycarbide, and a concentration of at least one of Al, O, or C in the first insulating layer in a thickness direction is not uniform.
 18. The semiconductor device of claim 17, further comprising a second insulting layer including one of SiON or SiOCN, wherein the insulating layer covers sidewalls of the MRAM cell structure.
 19. The semiconductor device of claim 18, wherein: the second ILD layer includes a first dielectric layer, a second dielectric layer on the first dielectric layer and a third dielectric layer on the second dielectric layer, the first dielectric layer, the second dielectric layer and the third dielectric layer are made of different materials from each other, and the conductive contact includes a lateral protrusion laterally protruding into one of the first ILD layer or the first dielectric layer.
 20. The semiconductor device of claim 19, wherein: one of the first or second dielectric layers includes SiC, SiCN or SiOCN, and the third dielectric layer includes a low-k dielectric material. 